3D X-ray Microscopes

Sigray’s 3D X-ray Microscope product family offers the most unique and innovative features on the market. Our turnkey microscopes offer a simple and intuitive experience for beginners while maintaining comprehensive access for power users. 

We’re vertically integrated across X-ray source, optics and detector which means we can bring you unique advances available nowhere else. 

We produce systems that span spatial resolutions from nanometers to millimeters to provide outstanding flexibility for a wide range of research application interests, including materials science, life science, semiconductor, additive manufacturing and pharmaceuticals.

Apex XCT-150 | High throughput sub-micron 3D x-ray microscope capable of complete 3D acquisitions on the order of minutes. Designed for semiconductor, biological stained tissues, and battery applications.

PrismaXRM-810 | Flagship sub-micron 3D X-ray microscope featuring best in class versatility, resolution and throughput.

Available upgrade to Talbot-Lau interferometry offers exclusive contrast modes: Quantitative Phase and Sub-resolution Darkfield

GoalHighest laboratory spatial resolution XRM at 35 nmFlagship XRM offering largest voltage range and 0.5 µm spatial resolutionRevolutionary X-ray source offers multiple quasi-monochromatic X-ray beams
Dimensions [m]2.3 L x 1.3 W x 1.5 H2.2 L x 1.2 W x 2.3 H 1.0 L x 0.8 W x 0.6 H
Weight [kg]21752730150
Source20 to 50 kV
3 target materials
30 to 160 kV
200 um min FOD
20 to 60 kV
Up to 5 target materials
Detector4MP Deep Cooled CCD
4MP Direct Detection CCD
4MP Deep Cooled CCD
7MP Flat Panel (optional)
4MP Deep Cooled CCD
Up to 5 objectives
7MP Flat Panel (optional)
Resolution35 nm0.5 µm 0.5 µm
Sample Size (diameter x height)50 x 50 um300 x 500 mm 50 x 50 mm
Sample Weight150 g25 kg500 g
Sample Handling RobotNoOptional
Up to 20 samples
Up to 10 samples